Micro Digital Gas air Thermal Mass Flow Controller
High Precision Automatic Thermal Mass Flow Controller With 4-20ma/RS485 Output for Regulating Gas Size, LCD Digital, It is specially designed for the measurement and process control of various small flow gases. The sensors in this series are made using advanced microelectromechanical systems (MEMS) flow sensing chips, combined with digital signal processing technology and flow control algorithms, to achieve precise control and intelligent processing of various gas flow rates.
Description
The mass flow controller is based on the patented internally compensated laminar flow pressure-difference technology. Equipped with built-in pressure and temperature sensors, it fully compensates for variations between volumetric flow and mass flow caused by changes in temperature and pressure. The mass flow controller uses microelectromechanical system (MEMS)technology. Can input the set flow rate, the valve response speed is fast. Control valve sampling servo motor, can accuratelycontrol the valve opening
Features & Parameters
| Model | EC100 | EC200 | EC300 | EC400 | EC450 |
| Flow range | 20SCCM～500SLPM | 10SCCM～500SLPM | 0.5SCCM～5000SLPM | 2SCCM～2000SLPM | 2SCCM～2000SLPM |
Accuracy | ±1.0%F.S. (2%～100% F.S.) | ±1.0%S.P.(30%～±100%F.S.) ±0.3%F.S.(1%～30%F.S.) | ±1.0%S.P.(20%～100%F.S. | ±1.0%S.P.(10%～100%F.S.) | ±0.5%S.P.(20%～100%F.S.) |
| Repeatability | ±0.2%F.S. | ±0.2%Rd(20%～100%F.S. | ±0.1%Rd(20%～100%F.S.) | ||
Pressure shift | ≤±0.1%F.S./100kPa（Benchmark 100kPaA) | ≤±0.1%Rd/100kPa（Benchmark 100kPaA) | |||
Pressure shift | ≤±0.05%F.S./℃（Benchmark 25℃） | ≤±0.02%F.S./℃（Benchmark 25℃） | |||
| Zero shift | ±0.2%F.S. | ±0.1%F.S. | |||
| Operating range | 2%～100%F.S. | 1%～100%F.S. | 0.5%～100%F.S. | ||
| Response time | ≤800ms | ≤600ms | |||
| Warm-up time | ≤1s | ||||
| Gas temperature | 0℃～50℃ | -20℃～60℃ | |||
| Ambient temperature | 0℃～50℃ | -20℃～60℃ | |||
| Pressure drop | 50kPa（≤5SLPM）；100kPa（10SLPM）；50kPa（20SLPM）； | ||||
| Proof pressure | 1.5 MPaA | ||||
| Max pressure | 600kPaA | 900kPaA | |||
| Leak rate | ≤1×10-10 Pa·m³/s He | ||||
| Power supply voltage | 24VDC(±20%) | ||||
| Mounting orientation sensitivity | None | ||||
| Process connectors | G thread、VCR、Swagelok、IGS | ||||
| Wetted materials | SUS316L、FKM、FFKM、EPDM、Neoprene | ||||
| Sealing | Rubber ring seal：FKM、FFKM、EPDM、Neoprene | ||||
| Communication | RS485、PROFIBUS、EtherCAT，PROFINET，DeviceNet、4～20mA / 0～5V | ||||
| Model | SC100 | SC200 |
| Flow range | 0.5SCCM～5000SLPM | 0.5SCCM～2000SLPM |
Accuracy | ±1.0%S.P.(20%~100%F.S.） | ±0.5%S.P.(20%~100%F.S.） ±0.1%F.S.(1%~20%F.S.） |
| Repeatability | ±0.2%F.S. | ±0.1%F.S. |
Pressure shift | Zero：≤±0.2%F.S./100KPa； Span：≤±0.2%F.S./100Kpa(Benchmark 100KPaA) | Zero：≤±0.05%F.S./100KPa； Span：≤±0.05%F.S./100Kpa(Benchmark 100KPaA) |
Temperature shift | Zero：≤±0.05%F.S./℃； Span：≤±0.05%F.S./℃（Benchmark 25℃） | Zero：≤±0.02%F.S./℃； Span：≤±0.02%F.S./℃（Benchmark 25℃） |
| Operating range | 1%～100%F.S. | |
| Response time | ≤700ms | |
| Warm-up time | ≤1s | |
| Gas temperature | -20℃～60℃ | |
| Proof pressure | 1.5 MPaA | |
| Pressure drop | 100~500kPa（≤250SLPM）; 200~500kPa（>250SLPM） | |
| Power supply voltage | 24VDC(±20%) | |
| Valve function | Normally closed | |
| Mounting orientation sensitivity | None | |
| Process connectors | G thread | |
| Wetted materials | SUS316L | |
| Sealing | Rubber ring seal：FKM | |
| Communication | RS485, 0～5V, 4～20mA | |
