CO2 LPG Nitrogen Gas Air Thermal Mass Flow Meter
Ziasiot mass flow meter has been our very popular gas air micro mass flow device over the years. The main technical performance is in the industry’s advanced level, with high sensitivity, high accuracy, a large range ratio and other characteristics; for the industrial environment, it has a number of anti-electromagnetic interference compatible designs and has a variety of signal outputs. The same is to support the analog signal and digital communication interface output to achieve a variety of functions, such as the management of the host computer; the product can be widely used in oil, gas, fluid, chemical, smelting, energy and other fields.
Description
Ziasiot Mass Flow Meter supports flow ranges from 0.5SCCM to 5000SLPM, pressures from 5KPaA to 2MPaA, and temperatures from -50 to 110℃. It can switch between more than 70 single media and mixed working fluids in real time and provides more than 10 digital/analog communication methods. Currently, it has formed a variety of general-purpose laminar flow differential pressure flowmeter/controller specifications, such as S/P/SC, which can meet the various flow control needs of high-end customers in semiconductors, new energy, new materials, and other industries.
Features
Based on patented internally compensated laminar flow differential pressure technology, the Ziasiot laminar mass flow meter incorporates pressure and temperature sensors. It effectively compensates for differences in volumetric flow rate and mass flow rate caused by temperature and pressure, enabling rapid and accurate measurement of five key parameters of process gases: real-time temperature, pressure, operating flow rate, standard flow rate, and cumulative flow rate. Whether you require precise and rapid measurement of gas flow, leak rate monitoring, or use as a standard meter for measurement value transfer and calibration, Ziasiot flow meters can provide you with the optimal solution.
Parameters
| Model | E100 | E200 | E300 | E400 | E450 |
| Flow range | 20SCCM～500SLPM | 10SCCM～500SLPM | 0.5SCCM～5000SLPM | 2SCCM～2000SLPM | 2SCCM～2000SLPM |
Accuracy | ±1.0%F.S. (2%～100% F.S.) | ±1.0%Rd(30%～±100%F.S.) ±0.3%F.S.(1%～30%F.S.) | ±1.0%Rd(20%～100%F.S. | ±1.0%Rd(10%～100%F.S.) | ±0.5%Rd(20%～100%F.S.) |
| Repeatability | ±0.2%F.S. | ±0.2%Rd(20%～100%F.S. | ±0.1%Rd(20%～100%F.S.) | ||
Pressure shift | ≤±0.1%F.S./100kPa（Benchmark 100kPaA) | ≤±0.1%Rd/100kPa（Benchmark 100kPaA) | |||
Temperature shift | ≤±0.05%F.S./℃（Benchmark 25℃） | ≤±0.02%F.S./℃（Benchmark 25℃） | |||
| Operating range | 2%～100%F.S. | 1%～100%F.S. | 0.5%～100%F.S. | ||
| Response time | ≤100ms | ||||
| Warm-up time | ≤1s | ||||
| Gas temperature | 0℃～50℃ | -20℃～60℃ | |||
| Ambient temperature | 0℃～50℃ | -20℃～60℃ | |||
| Pressure drop | 12kPa（≤5SLPM）；60kPa（10SLPM）；8kPa（20~50SLPM）；10kPa（100SLPM）； | ||||
| Proof pressure | 1.5 MPaA | ||||
| Max pressure | 900kPaA | ||||
| Leak rate | ≤1×10-10 Pa·m³/s He | ||||
| Power supply voltage | 24VDC(±20%) | ||||
| Current consumption | <150mA（＜3.6W） | ||||
| Mounting orientation sensitivity | None | ||||
| Process connectors | G thread、VCR、Swagelok、IGS | ||||
| Wetted materials | SUS316L、FKM、FFKM、EPDM、Neoprene | ||||
| Sealing | Rubber ring seal：FKM、FFKM、EPDM、Neoprene | ||||
| Communication | RS485、PROFIBUS、EtherCAT，PROFINET，DeviceNet、4～20mA / 0～5V | ||||
| Model | P300 | P400 | P450 |
| Flow range | 0.5SCCM～5000SLPM | 2SCCM～2000SLPM | 2SCCM～2000SLPM |
Accuracy | ±1.0%Rd(20%~100%F.S.)； | ±1.0%Rd(10%～100%F.S.)； | ±0.5%Rd(20%～100%F.S.)； |
| Repeatability | ±0.2%Rd(20%～100%F.S.); | ±0.1%Rd(20%～100%F.S.); | |
Pressure shift | ≤±0.1%Rd/100kPa（Benchmark 100kPaA) | ||
Temperature shift | ≤±0.02%F.S./℃（Benchmark 25℃） | ||
| Zero shift | ±0.1%F.S. | ||
| Operating range | 0.5%～100%F.S. | ||
| Response time | ≤100ms | ||
Warm-up time | ≤1s | ||
| Gas temperature | -20℃～60℃ | ||
| Pressure drop | 7kPa（≤20SLPM）;9kPa（50~100SLPM）;12kPa（200SLPM）; | ||
| Proof pressure | 1.5 MPaA | ||
| Max pressure | 900kPaA | ||
| Endurance time | 15 hours | ||
| Mounting orientation sensitivity | None | ||
| Process connectors | G thread | ||
| Wetted materials | SUS316L、FKM | ||
| Sealing | FKM | ||
| Communication | RS485 | ||
| Model | S100 | S200 |
| Flow range | 0.5SCCM～5000SLPM | 0.5SCCM～2000SLPM |
Accuracy | ±1.0%Rd(20%~100%F.S.） | ±0.5%Rd(20%~100%F.S.） ±0.1%F.S.(1%~20%F.S.） |
| Repeatability | ±0.2%F.S. | |
Pressure shift | Zero：≤±0.2%F.S./100KPa； Span：≤±0.2%F.S./100Kpa(Benchmark 100KPaA) | Zero：≤±0.05%F.S./100KPa； Span：≤±0.05%F.S./100Kpa(Benchmark 100KPaA) |
Temperature shift | Zero：≤±0.05%F.S./℃； Span：≤±0.05%F.S./℃（Benchmark 25℃） | Zero：≤±0.02%F.S./℃； Span：≤±0.02%F.S./℃（Benchmark 25℃） |
| Operating range | 1%～100%F.S. | |
| Response time | ≤100ms | |
| Warm-up time | ≤1s | |
| Gas temperature | -20℃～60℃ | |
| Pressure drop | 4kPa（≤5SLPM）; 8kPa（10~500SLPM）; 15kPa（1000~5000SLPM） | |
| Proof pressure | 1.5 MPaA | |
| Max pressure | 60kPaA~1MPaA | |
| Power supply voltage | 24VDC(±20%) | |
| Mounting orientation sensitivity | None | |
| Process connectors | G thread | |
| Wetted materials | SUS316L | |
| Sealing material | Rubber ring seal: FKM | |
| Communication | RS485, 0～5V, 4～20mA | |
Application
